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IXRF EDS Integration for JEOL

The Integrated EDS system combines the JEOL 5510, 5610, and 5910 series SEM and IXRF EDS user interfaces into a single application. The EDS toolbar is accessed directly from the SEM user interface allowing advanced microanalysis features to be performed directly on the live SEM image. All EDS data, along with the SEM image is stored in a single file.

Advanced Features (included with every system)

EDS, Imaging, X-ray Mapping, and Particle analysis in a single application
Complete spectrum processing including escape and sum peak removal,
automatic background removal, and net peak extractions using Gaussian deconvolution
Quantitative analysis using ZAF, with or without standards
Quantitative Spectral Matching
Automated acquisition and analysis of spectra from selected spots or areas on the image
Definable Phase X-ray Mapping by Wt%
FastMap technology stores all spectral data with each X-ray Map pixel (PTS Maps)
FastLinescan technology stores all spectral data with each linescan point (PTS Linescans)
Automated Single Field particle analysis

Model 500 EDS Hardware

Digital Pulse Processor with programmable gain and pulse pileup rejection
Programmable time constants 0.3, 0.5, 1, 2, 4, 8, 16, 32 (microseconds)
32-bit, 4096 channel multi-channel analyzer (MCA) PCI interface card
Automatic energy calibration
Adjustable detector bias
LN Monitor with bias shutdown for detector warm up protection
Digital Pulse Processor logic is downloaded from the PC for simple field upgrades
Built in, on board oscilloscope
Width x Height x Depth 315 x 112 x 250 mm (12.4 x 4.4 x 9.8 inches)
Weight 4.5 kg (10 lbs.)
Voltage 100/120/220/240 V AC user selectable. 47-63 Hz, 85 VA Maximum
Safety Standard EN61010-1 Electrical equipment for lab use, Electro Magnetic Compliance EN55022 Class A, EN50082-1, CE-mark

EDS Software

Collection of spectra into 25 (maximum) individual windows
0 to 40 keV spectral range at 10 eV per channel
One click operation for acquisition, automatic peak identification,
customizable spectrum processing, and quantification
Text overlay on spectra that can be saved with spectra
Export of spectra to standard image file formats (e.g., TIFF, JPEG)
Point and click cursor displays energy, counts, and possible elements present
Customizable Automatic element identification and labeling of peak
Identification of peaks through periodic table or elemental buttons
Customizable spectrum display (colors and fonts) for both on-screen display and printing
Complete customization of analysis report output
Microscope geometry setup and take-off angle calculator
Detector crystal and window setup calculator
Spectral overlay for comparison or background removal

EDS Quantitation Software

One-click quantitative analysis
Automatic sum and escape peak removal
Automatic correction for background using one of four background removal methods
Automatic peak-overlap correction using Linear or Non-Linear Gaussian deconvolution (no pre-acquired peak profiles required)
K-ratio determination
Automatic Standardless Quantification using ZAF (SEM) and Cliff-Lorimer (TEM) algorithms including correction for inter-element effects
Full capability for analysis with pure-element standards, compound standards, or standardless, or any combination
Qualitative Spectral Matching using stored spectra
Quantitative Spectral Matching using standards
Analysis Settings files store all quantitative analysis settings, ensuring consistent, repeatable analysis of each sample type
Combine multiple analyses into a single tabulated report
Component Calculator provides quantitative analysis with compounds (e.g., oxides)

X-ray Mapping and Linescans

One-click acquisition of x-ray maps; simply label the peaks on the spectrum and select the x-ray map button
FastMap and FastLinescan technologies store all spectral data and their locations
Maximum x-ray map resolutions (per element) is 2048 x 2048
Rapid and flexible map acquisitions using point dwell times as short as 10 microseconds
Live spectrum display during x-ray map acquisitions
Maps are displayed in 24-bit color
Simultaneous acquisitions of 31 x-ray maps with SEM image
Composite maps provide overlaying of maps on the SEM image
Real-time quantitative analysis display at each map pixel
Multiple Frame X-Ray Maps for higher precision maps frame averaging
Definable Phase mapping by Wt%
Create additional element x-ray maps and linescans without re-acquiring the x-ray map using the FastMap and FastLinescan technologies
Export X-ray maps to standard image files (e.g., TIFF, JPEG) or ASCII

Digital Imaging

Digital images are rapidly acquired "actively"
Brightness, Contrast, and customized color palette adjustments
Display of image gray level histogram
AC line voltage synchronization
Acquire images at up to 4096 x 4096 resolution
Crop/Zoom Images
Ability to acquire non-square images
Image pixel averaging: 2, 4, 8, or 16
Image Frame Averaging
Acquisition of gray scale in 12-bit resolution
Display images at 24-bit color resolution (16.7 million colors)
Image file browser displays "thumbnail" view of files for easy selection
Annotate images with a variety of sophisticated interactive measurement tools
Export images to standard image file formats (e.g., TIFF, JPEG)
Import images from a variety of image formats (TIFF, JPEG, etc)
Multi-point analysis software for unattended spectral data collection and processing from selected points and/or areas on an image
Adjustable Micron Marker and kV displayed on image
Imaging hardware and software calibrated to SEM magnification

Image Processing

Image processing steps are stored with the image macro recorder
Border particle removal
Particle sorting by dimensional criteria
Particle exclusion by feature measurements
Particle classification by chemical composition (EDS data)
Electron-beam control for feature scanning or spot-mode analysis
Histogram equalization
User definable kernels of 3x3, 5x5, 7x7 and 9x9 formats
Erosion, dilation, hole filling, and skeletonization
Smoothing, sharpening, median filtering
Sobel, Laplace, vertical, and horizontal edge filtering
Binarization of images
Morphological processing
Customizable report generation including histograms and scatter plots
All data, optionally including the image and EDS spectra, are stored in the database

EDS Detector

Si(Li) detector crystal with 10 mm2 active area
133 eV resolution at FWHM at Mn (5.90 keV)
81 eV resolution at FWHM at F (0.68 keV)
20,000:1 Peak-to-Background ratio
Capable of detecting elements down to and including Boron
Moxtek thin window capable of withstanding atmospheric pressure
7.5 liter Dewar with 5-day cooling capacity