IXRF EDS Integration for LEO

The Integrated EDS system combines the LEO 1400's and 1500's series SEM and IXRF EDS user interfaces into a single application. The EDS toolbar is accessed directly from the SEM user interface allowing advanced microanalysis features to be performed directly on the live SEM image. All EDS data can be stored in a single file. 

Advanced Features (included with every system)

• Quantitative EDS, X-ray Mapping, and Linescan analysis in a single application
• Complete spectrum processing including escape and sum peak removal,  automatic background removal, and net peak extractions using Gaussian deconvolution
• Quantitative analysis using ZAF, with or without standards
• Quantitative Spectral Matching
• Automated acquisition and analysis of spectra from selected spots or areas on the image
• Definable Phase X-ray Mapping by Wt%
• FastMap technology stores all spectral data with each X-ray Map pixel (PTS Maps)
• FastLinescan technology stores all spectral data with each linescan point (PTS Linescans)
  

Model 500 EDS Hardware

• Digital Pulse Processor with programmable gain and pulse pileup rejection
• Programmable time constants 0.3, 0.5, 1, 2, 4, 8, 16, 32 (microseconds)
• 32-bit, 4096 channel multi-channel analyzer (MCA) PCI interface card
• Automatic energy calibration
• Adjustable detector bias
• LN Monitor with bias shutdown for detector warm up protection
• Digital Pulse Processor logic is downloaded from the PC for simple field upgrades
• Built in, on board oscilloscope
• Width x Height x Depth 315 x 112 x 250 mm (12.4 x 4.4 x 9.8 inches)
• Weight 4.5 kg (10 lbs.)
• Voltage 100/120/220/240 V AC user selectable. 47-63 Hz, 85 VA Maximum
• Safety Standard EN61010-1 Electrical equipment for lab use, Electro Magnetic Compliance EN55022 Class A, EN50082-1, CE-mark
  

EDS Software

• Collection of spectra into 25 (maximum) individual windows
• 0 to 40 keV spectral range at 10 eV per channel
• One click operation for acquisition, automatic peak identification,
• customizable spectrum processing, and quantification
• Text overlay on spectra that can be saved with spectra
• Export of spectra to standard image file formats (e.g., TIFF, JPEG)
• Point and click cursor displays energy, counts, and possible elements present
• Customizable Automatic element identification and labeling of peak
• Identification of peaks through periodic table or elemental buttons
• Customizable spectrum display (colors and fonts) for both on-screen display and printing
• Complete customization of analysis report output
• Microscope geometry setup and take-off angle calculator
• Detector crystal and window setup calculator
• Spectral overlay for comparison or background removal

EDS Quantitation Software

• One-click quantitative analysis
• Automatic sum and escape peak removal
• Automatic correction for background using one of four background removal methods
• Automatic peak-overlap correction using Linear or Non-Linear Gaussian deconvolution (no pre-acquired peak profiles required)
• K-ratio determination
• Automatic Standardless Quantification using ZAF (SEM) and Cliff-Lorimer (TEM) algorithms including correction for inter-element effects
• Full capability for analysis with pure-element standards, compound standards, or standardless, or any combination
• Qualitative Spectral Matching using stored spectra
• Quantitative Spectral Matching using standards
• Analysis Settings files store all quantitative analysis settings, ensuring consistent, repeatable analysis of each sample type
• Combine multiple analyses into a single tabulated report
• Component Calculator provides quantitative analysis with compounds (e.g., oxides)

X-ray Mapping and Linescans

• One-click acquisition of x-ray maps; simply label the peaks on the spectrum and select the x-ray map button
• FastMap and FastLinescan technologies store all spectral data and their locations
• Maximum x-ray map resolutions (per element) is 2048 x 2048
• Rapid and flexible map acquisitions using point dwell times as short as 10 microseconds
• Live spectrum display during x-ray map acquisitions
• Maps are displayed in 24-bit color
• Simultaneous acquisitions of 31 x-ray maps with SEM image
• Composite maps provide overlaying of maps on the SEM image
• Real-time quantitative analysis display at each map pixel
• Multiple Frame X-Ray Maps for higher precision maps frame averaging
• Definable Phase mapping by Wt%
• Create additional element x-ray maps and linescans without re-acquiring the x-ray map using the FastMap and FastLinescan technologies
• Export X-ray maps to standard image files (e.g., TIFF, JPEG) or ASCII

EDS Detector

• Si(Li) detector crystal with 10 mm2 active area
• 133 eV resolution at FWHM at Mn (5.90 keV)
• 81 eV resolution at FWHM at F (0.68 keV)
• 20,000:1 Peak-to-Background ratio
• Capable of detecting elements down to and including Boron
• Moxtek thin window capable of withstanding atmospheric pressure
• 7.5 liter Dewar with 5-day cooling capacity