IXRF EDS Integration for JEOL With Stage Automation/Particle Analysis

The Integrated EDS system combines the JEOL 5510, 5610, and 5910 series SEM and IXRF EDS user interfaces into a single application. The EDS toolbar is accessed directly from the SEM user interface allowing advanced microanalysis features to be performed directly on the live SEM image. All EDS data, along with the SEM image is stored in a single file. 

Along with this futuristic integration comes complete stage automation along with a wide range of feature/particle analysis applications. 

Advanced Features (included with every system)

• EDS, Imaging, X-ray Mapping, and Particle analysis in a single application
• Complete spectrum processing including escape and sum peak removal,
  automatic background removal, and net peak extractions using Gaussian deconvolution
• Quantitative analysis using ZAF, with or without standards
• Quantitative Spectral Matching
• Automated acquisition and analysis of spectra from selected spots or areas on the image
• Definable Phase X-ray Mapping by Wt%
• FastMap technology stores all spectral data with each X-ray Map pixel (PTS Maps)
• FastLinescan technology stores all spectral data with each linescan point (PTS Linescans)
• Automated Single Field particle analysis

Particle Analysis with Stage Automation

• Motorized stage control and automation to allow SEM to analyze particles in unattended mode
• Sample holder setup for batch analysis
• SEM Stage control and automation to allow automatic analysis
• of particles, inclusions, or phases from multiple fields of view
• Sample holder setup for automatic analysis of multiple samples per sample holder
• Stage locations of fields and particles are stored. this allows accurate positioning
• on any particle for manual inspection after accquiring particle analysis data
• Automatic beam shut-off after completion
• Images can optionally be stored for each field
• All setup, including image processing and EDS analysis, are stored in Microsoft Access^TM
  database files
• All collected data, optionally including the image and EDS spectra, are stored in Microsoft Access^TM
  database files
• Particle analysis setup based on simple or advanced "Wizard" approach
  

 

Model 500 EDS Hardware

• Digital Pulse Processor with programmable gain and pulse pileup rejection
• Programmable time constants 0.3, 0.5, 1, 2, 4, 8, 16, 32 (microseconds)
• 32-bit, 4096 channel multi-channel analyzer (MCA) PCI interface card
• Automatic energy calibration
• Adjustable detector bias
• LN Monitor with bias shutdown for detector warm up protection
• Digital Pulse Processor logic is downloaded from the PC for simple field upgrades
• Built in, on board oscilloscope
• Width x Height x Depth 315 x 112 x 250 mm (12.4 x 4.4 x 9.8 inches)
• Weight 4.5 kg (10 lbs.)
• Voltage 100/120/220/240 V AC user selectable. 47-63 Hz, 85 VA Maximum
• Safety Standard EN61010-1 Electrical equipment for lab use, Electro Magnetic Compliance EN55022 Class A, EN50082-1, CE-mark
  

EDS Software

• Collection of spectra into 25 (maximum) individual windows
• 0 to 40 keV spectral range at 10 eV per channel
• One click operation for acquisition, automatic peak identification,
• customizable spectrum processing, and quantification
• Text overlay on spectra that can be saved with spectra
• Export of spectra to standard image file formats (e.g., TIFF, JPEG)
• Point and click cursor displays energy, counts, and possible elements present
• Customizable Automatic element identification and labeling of peak
• Identification of peaks through periodic table or elemental buttons
• Customizable spectrum display (colors and fonts) for both on-screen display and printing
• Complete customization of analysis report output
• Microscope geometry setup and take-off angle calculator
• Detector crystal and window setup calculator
• Spectral overlay for comparison or background removal

EDS Quantitation Software

• One-click quantitative analysis
• Automatic sum and escape peak removal
• Automatic correction for background using one of four background removal methods
• Automatic peak-overlap correction using Linear or Non-Linear Gaussian deconvolution (no pre-acquired peak profiles required)
• K-ratio determination
• Automatic Standardless Quantification using ZAF (SEM) and Cliff-Lorimer (TEM) algorithms including correction for inter-element effects
• Full capability for analysis with pure-element standards, compound standards, or standardless, or any combination
• Qualitative Spectral Matching using stored spectra
• Quantitative Spectral Matching using standards
• Analysis Settings files store all quantitative analysis settings, ensuring consistent, repeatable analysis of each sample type
• Combine multiple analyses into a single tabulated report
• Component Calculator provides quantitative analysis with compounds (e.g., oxides)

X-ray Mapping and Linescans

• One-click acquisition of x-ray maps; simply label the peaks on the spectrum and select the x-ray map button
• FastMap and FastLinescan technologies store all spectral data and their locations
• Maximum x-ray map resolutions (per element) is 2048 x 2048
• Rapid and flexible map acquisitions using point dwell times as short as 10 microseconds
• Live spectrum display during x-ray map acquisitions
• Maps are displayed in 24-bit color
• Simultaneous acquisitions of 31 x-ray maps with SEM image
• Composite maps provide overlaying of maps on the SEM image
• Real-time quantitative analysis display at each map pixel
• Multiple Frame X-Ray Maps for higher precision maps frame averaging
• Definable Phase mapping by Wt%
• Create additional element x-ray maps and linescans without re-acquiring the x-ray map using the FastMap and FastLinescan technologies
• Export X-ray maps to standard image files (e.g., TIFF, JPEG) or ASCII

Digital Imaging

• Digital images are rapidly acquired "actively"
• Brightness, Contrast, and customized color palette adjustments
• Display of image gray level histogram
• AC line voltage synchronization
• Acquire images at up to 4096 x 4096 resolution
• Crop/Zoom Images
• Ability to acquire non-square images
• Image pixel averaging: 2, 4, 8, or 16
• Image Frame Averaging
• Acquisition of gray scale in 12-bit resolution
• Display images at 24-bit color resolution (16.7 million colors)
• Image file browser displays "thumbnail" view of files for easy selection
• Annotate images with a variety of sophisticated interactive measurement tools
• Export images to standard image file formats (e.g., TIFF, JPEG)
• Import images from a variety of image formats (TIFF, JPEG, etc)
• Multi-point analysis software for unattended spectral data collection and processing from selected points and/or areas on an image
• Adjustable Micron Marker and kV displayed on image
• Imaging hardware and software calibrated to SEM magnification

Image Processing

• Image processing steps are stored with the image macro recorder
• Border particle removal
• Particle sorting by dimensional criteria
• Particle exclusion by feature measurements
• Particle classification by chemical composition (EDS data)
• Electron-beam control for feature scanning or spot-mode analysis
• Histogram equalization
• User definable kernels of 3x3, 5x5, 7x7 and 9x9 formats
• Erosion, dilation, hole filling, and skeletonization
• Smoothing, sharpening, median filtering
• Sobel, Laplace, vertical, and horizontal edge filtering
• Binarization of images
• Morphological processing
• Customizable report generation including histograms and scatter plots
• All data, optionally including the image and EDS spectra, are stored in the database

 

EDS Detector

• Si(Li) detector crystal with 10 mm2 active area
• 133 eV resolution at FWHM at Mn (5.90 keV)
• 81 eV resolution at FWHM at F (0.68 keV)
• 20,000:1 Peak-to-Background ratio
• Capable of detecting elements down to and including Boron
• Moxtek thin window capable of withstanding atmospheric pressure
• 7.5 liter Dewar with 5-day cooling capacity