IXRF EDS Integration for JEOL Microscopes

Simple, Powerful, Intuitive User Interface

The Integrated EDS system combines the JEOL 5510, 5610, and 5910 series SEM and IXRF EDS user interfaces into a single application. The EDS Toolbar is accessed directly from the SEM user interface allowing advanced microanalysis features to be performed directly on the live SEM image. Spectra, X-ray Maps, and Linescans can be directly acquired from selected regions of the SEM image with a single click on the EDS Toolbar.  The EDS and SEM user interfaces combine to provide one seamless Microanalysis tool.

Shown below are a spectrum and an x-ray map acquired on a sample.  

Logical, Sample-Based, Data Storage

After analyzing a sample it is important to be able to store the results of the analysis simply and efficiently.  The Integration software does just that.  All EDS data, along with the SEM image can be stored in a single file.  This includes:

• The SEM image
• All Spectra and their locations
• All X-ray Maps and their locations
• All Linescans and their locations

Recalling the data at a later date is very easy.  Simply opening the file restores the SEM image from the file, displays the positions of each of the EDS data on the image, and restores the EDS data.  All of the data for a sample are in a single file and can be accessed by one simple recall action.

Advanced Capabilities

IXRF takes full advantage of  the tight coupling of the EDS and SEM systems to provide an easy-to-use automated particle analysis with stage automation.  Image Analysis, Feature Analysis, Particle Identification using EDS, combined with Stage Automation are all just a Click away on the EDS Toolbar. 

Product Specifications without stage automation
 
Product Specifications with stage automation/particle analysis
 
Hardware Overview