IXRF EDS Integration for LEO Microscopes

Simple, Powerful, Intuitive User Interface

The Integrated EDS system combines the LEO 1400 and 1500 series SEM and IXRF EDS user interfaces into a single application. The EDS Toolbar is accessed directly from the SEM user interface allowing advanced microanalysis features to be performed directly on the live SEM image. Spectra, X-ray Maps, and Linescans can be directly acquired from selected regions of the SEM image with a single click on the EDS Toolbar.  The EDS and SEM user interfaces combine to provide one seamless Microanalysis tool.

Shown above is the EDS Toolbar with a spectrum acquired from a spot location on the SEM image.

Logical, Sample-Based, Data Storage

After analyzing a sample it is important to be able to store the results of the analysis simply and efficiently.  The Integration software does just that.  All EDS data can be stored in a single file.  This includes:

Recalling the data at a later date is very easy.  Simply opening the file displays the positions of each of the EDS data on the image, and restores the EDS data.  All of the data for a sample are in a single file and can be accessed by one simple recall action.


Product Specifications
Hardware Overview
Software Overview