1. Anode Magnetron - type target loaded horizontally: Ultra low discharge voltage reduced ions damage and thermal damage to the sample.
  2. Low vacuum coating and floating sample stage design: Current does not pass through the sample and elevated temperature in a narrow range can reduce the sample damage.
  3. Simplicity of operation: Switch on the EVAC button, and the coating program can execute automatically in the setting - up time.

MSP-2S is the metal coating apparatus to improve the generating efficiency of the secondary electron, and preventing from the charge-up of the sample while SEM observation.

MSP-2S adopted a planer-magnetron electrode resultant makes a cool sputter coating method by the low voltage plasma discharge.

Specimen handled, setting the coating time, the EVAC program will execute after clicking the start button; after coating program ended, the vacuum pump will terminate automatically, then removing the specimen.


Electric power supply

AC100 V, Maximum current 10A

Equipment Size

340 mm width × 200 mm depth × 350 mm
The oil rotary pump was built-in, desk top style. m=14 Kg

Vacuum system

Evacuation speed: 20 l / min
Ultimate vacuum degree is 2Pa
Perfect coating chamber vacuum degree is 8-10 Pa

Distance of the target and specimen

Standard: L=25mm
Maximum: L=35mm
It is adjusted with the auxiliary stage plate

Coating chamber size

65 mm depth and 120 mm in-diameter. Pyrex glass made.

Target electrode size

55 mm diameter, the permanent magnet built-in planer magnetron

Target Metal

Au-Pd adopted as standard. Au, Pt-Pd, and Pt are as option

Specimen Stage

50mm diameter, floating stage by electrically separated from the anode

Introducing Benchtop XRF

About Us

Since its incorporation over two decades ago, IXRF Systems has proven itself as a leader in x-ray microanalysis. IXRF uses innovative design and technology for example, IXRF remains the only EDS company capable of using the SEM PC, offering a “One PC Solution.”

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Contact Us

IXRF Sytems, Inc. reserves the right to change specifications without notice. Copyright 2015 IXRF Systems Inc.

10421 Old Manchaca Rd., Suite 620
Austin, TX 78748
Telephone: 512.386.6100
Fax: 512.386.6105