Features:

  1. Anode Magnetron - type target loaded horizontally: Ultra low discharge voltage reduced ions damage and thermal damage to the sample.
  2. Low vacuum coating and floating sample stage design: Current does not pass through the sample and elevated temperature in a narrow range can reduce the sample damage.
  3. Simplicity of operation: Switch on the EVAC button, and the coating program can execute automatically in the setting - up time.

Purpose
MSP-2S is the metal coating apparatus to improve the generating efficiency of the secondary electron, and preventing from the charge-up of the sample while SEM observation.

Principle
MSP-2S adopted a planer-magnetron electrode resultant makes a cool sputter coating method by the low voltage plasma discharge.

Operation
Specimen handled, setting the coating time, the EVAC program will execute after clicking the start button; after coating program ended, the vacuum pump will terminate automatically, then removing the specimen.

Specifications

Electric power supply

AC100 V, Maximum current 10A

Equipment Size

340 mm width × 200 mm depth × 350 mm
The oil rotary pump was built-in, desk top style. m=14 Kg

Vacuum system

Evacuation speed: 20 l / min
Ultimate vacuum degree is 2Pa
Perfect coating chamber vacuum degree is 8-10 Pa

Distance of the target and specimen

Standard: L=25mm
Maximum: L=35mm
It is adjusted with the auxiliary stage plate

Coating chamber size

65 mm depth and 120 mm in-diameter. Pyrex glass made.

Target electrode size

55 mm diameter, the permanent magnet built-in planer magnetron

Target Metal

Au-Pd adopted as standard. Au, Pt-Pd, and Pt are as option

Specimen Stage

50mm diameter, floating stage by electrically separated from the anode
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Introducing Benchtop XRF




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Since its incorporation over two decades ago, IXRF Systems has proven itself as a leader in x-ray microanalysis. IXRF uses innovative design and technology for example, IXRF remains the only EDS company capable of using the SEM PC, offering a “One PC Solution.”



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IXRF Sytems, Inc. reserves the right to change specifications without notice. Copyright 2015 IXRF Systems Inc.



10421 Old Manchaca Rd., Suite 620
Austin, TX 78748
Telephone: 512.386.6100
Fax: 512.386.6105