Truly unique concept, fastest stage automation, effective for large-area mapping, batch sample analysis and high volume. Adapts to any SEM stage.

The µ-PIEZO is an ultra-fast piezo sub-stage with zero backlash correction. This sub-stage works in conjunction with any SEM stage. Moving as fast as 10mm per second. Utilizing the most comprehensive crossed-roller bearing and integrated sensor technology, 0.5 micron resolution is achievable.

Each µ-PIEZO stage comes with a 15 speed joystick controller; with a working area of 25x25mm2 up to 300x300mm2 and the integrated holder for sample stubs it can for example be applied as compact sub-stage in a scanning electron microscope. The stage is suitable for both micro-and nanopositioning tasks.

Hand Control Module
The module provides control knobs and joysticks for controlling the positioners. A display on the module supports setting control parameters and shows the current status.

- 12V power supply

Basic Data

Working Area

25x25mm2 up to 300x300mm2 unlimited Rotation

Blocking Force

min 3.0N

5 Mile Warranty


51mmx51mm travel with no backlash correction


High quality high vacuum interface





max 30mm/s

Step Width

Between 50nm and 500nm




AC Adapter

USB or SUB-D Cable



Introducing Benchtop XRF

About Us

Since its incorporation over two decades ago, IXRF Systems has proven itself as a leader in x-ray microanalysis. IXRF uses innovative design and technology for example, IXRF remains the only EDS company capable of using the SEM PC, offering a “One PC Solution.”

Our Location

Contact Us

IXRF Sytems, Inc. reserves the right to change specifications without notice. Copyright 2015 IXRF Systems Inc.

10421 Old Manchaca Rd., Suite 620
Austin, TX 78748
Telephone: 512.386.6100
Fax: 512.386.6105