The chief component of x-ray Fluorescence brought into the SEM chamber is a low powered transmission target x-ray tube. The tubes are reduced in size and produce less heat than larger, higher powered tubes. Mo, W and Ag thin film targets deposited on a Be window are available for varying applications.

X-ray tube additions may be interfaced to almost any SEM. High angle (35deg) as well as horizontal flange mounts are available for every tube package.

Packaged tubes may be operated up to 50kV and come with integral high voltage power supplies. Power supplies are integrated with interlocking vacuum sensors which shut off the x-rays when the SEM chamber is vented. Each unit automatically “ramps” the tubes for increased longevity.

The addition of focusing capillary optics enables microspot XRF analysis down to 10 microns. A greatly reduced spot size increases XRF x-ray elemental mapping capability and enhances trace analysis at the micron level.

Multi-layer thin film analysis, thickness gauging material coating, etc. are also made possible by integrating XRF within the SEM. These are typical table-top applications for XRF which now may be brought into the SEM chamber.

Combined EDS and XRF X-ray mapping bring previously unseen capability to the microscopist. Never before have the two been combined and made commercially available for the microanalyst.

The addition of XRF to the SEM brings:

  • Higher peak to background ratios
  • Greater elemental sensitivity for higher Z elements
  • Less complex handling of various peak overlaps
  • Analysis of non-conductive materials without coating
  • Integrated with EDS software for the most accurate low energy-high energy (full spectrum) analysis available
  • Sensitivity exceeding SEM-EDS by a factor of 10-1000
  • Increased beam stability, premium X-ray detectors and greater vacuum, yields higher accuracy when using standards making ppm level analysis a snap!
XRF provides non-destructive analysis of various sample sizes and sample types including solids, environmental samples, powders and residues. Below are examples of common applications for traditional tabletop (bench top) XRF that are now available inside the SEM:

  • Forensics Glass Analysis
  • Ink and Paint Chip Analysis
  • Jewelry and Currency Analysis
  • Gunshot Scatter Pattern
  • Solder Analysis (Sn Whisker Spec)
  • Electronics Component Analysis
  • Catalysts
  • Ceramics, minerals and soils
  • Failure Analysis and quality control
  • Metal Alloys and Wear Debris
  • Paper Analysis
  • Coating Thickness for Thin Films Composition
  • Toxic Heavy Metals
  • Geological Samples


Trace elemental mapping is possible for nearly all of the above applications. XRF mapping can be performed using either of our products; shown here by this mineral map using the X-Beam.

The IXRF option Xb, offers the ability to use both the Electron Beam and Micro-XRF beam simultaneously. With the Electron Beam at 3-5kV, only the light elements are excited. There is no significant background added to the XRF spectra, allowing all the elements in the sample to be seen. Below are example maps of both excitation in “play”, on the same sample, at the same time! Never before has this ability been demonstrated.

Whether old or new, IXRF products can be mounted on virtually any SEM. IXRF products have been configured and installed on low-pressure, variable-pressure and field emission microscopes.

IXRF products can accommodate almost any SEM chamber design. IXRF products can be phalanged and mounted vertically or horizontally to achieve maximum elemental detection.

Introducing Benchtop XRF

About Us

Since its incorporation over two decades ago, IXRF Systems has proven itself as a leader in x-ray microanalysis. IXRF uses innovative design and technology for example, IXRF remains the only EDS company capable of using the SEM PC, offering a “One PC Solution.”

Our Location

Contact Us

IXRF Sytems, Inc. reserves the right to change specifications without notice. Copyright 2015 IXRF Systems Inc.

10421 Old Manchaca Rd., Suite 620
Austin, TX 78748
Telephone: 512.386.6100
Fax: 512.386.6105