Micro X-ray Fluorescence Hyperspectral Imager for Elemental Analysis

ATLAS M microEDXRF Spectrometer

circuit board

IXRF Systems’ ATLAS M microEDXRF spectrometer is the latest general purpose micro/small spot energy dispersive X-ray fluorescence (EDXRF) spectrometer for the measurement and mapping of elements from sodium (Na) through uranium (U). Designed to image and analyze a wide variety of sample types, ATLAS leads the industry in virtually every major specification category from the most powerful software and the highest detector active area, to our superior perpendicular geometry and smallest micro-spot.

ATLAS’ Iridium Ultra software platform, developed with SEM/EDS elemental mapping and analytical functionality, is unsurpassed in it’s ability to provide elemental and phase mapping, line scans, critical dimensions (CD) as well as qualitative and quantitative elemental analyses of solids, liquids, particles, powders and thin films. The functional, flexible, and feature-rich software suite guarantees unprecedented productivity. ATLAS M is the microXRF (μEDXRF) elemental analyzer that leads with innovation.

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Micro X-ray fluorescence (µXRF, µEDXRF, microXRF, microEDXRF) spectroscopy is an elemental analysis technique that relies on the same principles as X-ray fluorescence (XRF) spectrometry. The difference is that micro x-ray fluorescence (microEDXRF) spectrometry has a spatial resolution with a diameter many orders of magnitude smaller than conventional XRF, WDXRF or EDXRF spectrometers. Practically, microEDXRF spectrometers with high-precision scanning XYZ-stages  — like the ATLAS series —  function as a type of  XRF hyperspectral imaging microscope, where each pixel (in a map or image) contains information from 4 – 40 keV in the electromagnetic spectrum.

While a smaller excitation spot can be achieved by restricting X-ray beam using a pinhole aperture, this method blocks much of the X-ray flux which has an adverse effect on the sensitivity of trace elemental analysis. Modern polycapillary focusing X-ray optics are able to create small focal spots of just a few micrometers in diameter. By using such X-ray optics, the IXRF Systems’ ATLAS series of imaging spectrometers provide a tiny focal spot (down to  5 μm, depending on desired configuration) that is much more intense and allows for enhanced trace element analysis and the creation of hyperspectral images of a sample. Micro X-ray fluorescence (μEDXRF) spectometry is commonly employed in many applications, such as: botany, cement, forensics, small feature evaluations, elemental mapping, mineralogy, metals & alloys, electronics, multi-layered coating analysis, micro-contamination detection, film and plating thickness, biology and environment.*

ATLAS microEDXRF elemental maps of K, Ca, Se and sum of X-rays image of a hydrated youngest fully opened leaflet of
Neptunia amplexicaulis (CLICK to ENLARGE)

X-ray source


  • 50kV/50W/1mA Rh target (others available) X-ray tube
  • Filter wheel with up to 8 filters positioned before the focusing optic
  • Optional use of two x-ray tubes for different element ranges, targets, and spot sizes
  • Spot Size: >5μm
SDD detectors for SEM
Optical kernel


  • Mix and match up to 4 Silicon Drift Detectors (SDD)
    • For increased precision and/or reduced acquisition times
  • 50mm2 to 150mm2 active area
    • Highest resolution to highest counting rate
  • Available resolutions: ≤130-145eV resolution
  • Peltier cooling
Quad detectors

High precision stages

  • Motorized XY, Z optional
  • Speeds up to 300mm/s
    • Map acquisitions at ≤ 1ms/pixel
  • Accuracy < 1µm
  • Custom adapters available
Liquids and powders

Sample types and conditions

  • Air, vacuum, and helium atmosphere
  • Vacuum ready in under one minute
  • Solids, liquids, powders and thin films
Atlas M

Chamber and geometry

  • Chamber size: 508 x 457 x 254 mm (20 x 18 x 10 inches)
  • Top-down perpendicular geometry from tube to sample
  • Mapping area: 220 x 200 mm under automatic control
  • Sample view: 3 sample positioning and analysis cameras
    • Samples may be positioned manually with the door open

Iridium Ultra mapping and analysis software

Iridium Ultra software

Acquisition and quantitation

  • One-click acquisition and automatic peak identification
  • Customizable identification, labeling, processing, and quantification
  • Scrolling periodic chart
  • Drag and drop overlay
  • Automatic overlap correction, sum/escape peak removal, background correction, and linear/non-linear deconvolution
  • Fundamental Parameters (FP) and Quantitative Match
  • Material classification database

Imaging and analysis

  • Multi-Point automated analysis directly from image
  • Morphological processing for rapid feature size measurements
  • Image stitching and montage
  • Segmentation and feature segregation
  • Particle analysis package including border removal, sorting, exclusion, and classification by composition

Mapping and linescans

  • Simultaneous acquisition of 35 elements
  • Stored spectral data for every pixel
  • Live spectrum display during acquisition
  • Single or multiple map acquisition from image
    • Overview or spot camera
  • Map stitching and montage
  • Extract spectra from map: point, area, freehand
  • Create linescan from map
  • Mouse-over view intensities and concentrations
  • Phase Analysis
  • Multi-compositional map display
    • Of element and compound ranges
  • Overlay linescans on image

Specialty and automation

  • Multilayer thin film and coatings analysis up to 8 layers
  • Serpentine continuous mapping (dual directional mapping)
  • ASTM E2926-13 Glass Analysis
  • Track, store, and recall all stage locations and images

Product features

  • Spot size down to 5 microns with anti-halo optic
  • SDD detector w/ active area up to 150 mm2
  • Large chamber volume
  • 50 kV/50 W tube
  • Multi-point/multi-area automation & mapping
  • Air, vacuum, helium for solids, liquids, and powders
Atlas M



Elemental range:

Sodium (Na) through uranium (U)

Sample types:

Solids, liquids, particles, powders and thin films

Sample chamber size:

950 x 650 x 365 mm (37 x 26 x 14 inches)

Analysis atmosphere:

Air, vacuum or He(g) purge

Primary X-ray source:

50 W max power, 50 kV @ 1 mA

Optional secondary X-ray source:

4-12 W max power,  40-60 kV @ 0.4-1 mA

X-ray source optics:

Polycapillary or aperture collimation

X-ray source anode:

Rhodium (others optionally available)

X-ray source spot size:

≥5 to 1000 μm

X-ray source filters:

Up to 8

Primary X-ray source geometry:

Top-down beam (perpendicular to sample stage)


1 standard, optionally up to a maximum of 4

Detector types:

Silicon drift detector (SDD) standard (PIN-diode is optionally available)

Detector active area:

50 to 150 mm2

Sample stage type:

Motorized X,Y and Z (optional)

Sample stage travel:

600(W) x 300(D) x 150(H) mm

Mapping travel:

400(X) x 300(Y) mm

Mapping scan speed:

1-3 ms/pixel

Stage XY speed:

Up to 300 mm/s

Sample view:

3 cameras for sample positioning and analysis

Operating system:

SFF PC w/ Microsoft® Windows™ 10 OS

Analysis and control software:

Iridium Ultra: provides complete control of parameters, filters, cameras, optical microscopes, sample illumination and positioning, and measurement media

Quality and safety:

CE marked, RoHS, radiation < 0.5 μSv/h


1690(L) x 787(W) x 1630(H) mm (67 x 31 x 64 inches)


100-240 V, 1 phase, 50/60 Hz

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