IXRF Systems
World's Most Advanced
Microanalysis and microEDXRF

Welcome to the Home of IRIDIUM ULTRA
Leading with Microanalysis Innovation



The Ultimate μXRF:
• Largest Chamber
• Most Detectors
• Best Software


SEM-XRF Upgrades

Add an IXRF X-ray Source & Software
to your Electron Microscope
for Trace Elemental Analysis
and Thin Film Analysis
of Metals and Other Heavy Elements



Upgrade your SEM
with the Very Latest
EDS Software and
SDD Detector Technology

Our Products

For more than two decades IXRF has been designing and manufacturing high-end X-ray Microanalysis systems that are fitted to Scanning Electron Microscopes (SEM/EDS). Almost 10 years ago, IXRF developed SEM-XRF microscope attachments allowing broader elemental analysis coverage. In 2014, IXRF launched our ATLAS series of general purpose, micro spot energy dispersive X-ray fluorescence (microEDXRF) spectrometers for the measurement and mapping of elements from sodium (Na) through uranium (U). We specialize in: SEM/EDS, SEM-XRF and microEDXRF.

Made in U.S.A.


Imaging XRF Spectrometers

The ATLAS series of microEDXRF microscopic imaging spectrometers are the latest general purpose micro-spot energy dispersive X-ray fluorescence (EDXRF) instruments for the measurement and mapping of elements from sodium (Na) through uranium (U). Designed to image and analyze a wide variety of sample types,

ATLAS leads the industry in virtually every major specification category from the most powerful software and the highest detector active area, to our superior perpendicular geometry and smallest micro-spot.



SEM/EDS:  For scanning electron microscopes (SEM), we offer a complete EDS (EDX) system: software,  SDD detectors, digital signal processor and software. Our Windows®-10 based EDS software – Iridium Ultra – delivers all-inclusive  functionality.

SEM-XRF:  IXRF’s Xb micro-spot X-ray source adds the capabilities of a complete micro X-ray fluorescence (microXRF) spectrometer to any scanning electron microscope (SEM). μXRF users benefit from non-destructive measurements, superior trace element sensitivity and broader elemental coverage (Na through U) .

how it works?

View Our Videos

EDS RoboStage

EDS Multi Part Acquire

EDS Export to Word

EDS Morphology

Scrolling Element Markers

Quant Spectrum Match

View Linescan Data

Stored Spectrum Extraction

Linescan Overlay


Application Customization

Auto Quick Quant

Auto Peak I.D.

Compare Spectra

Custom Template & Report

Custom Settings

Energy Calibration

Estimate kV

Interactive Help

Linescan Extraction

Map Feature Demonstration

Map Intensity & Conc

Map Overlay

Max Pixel Spectrum

Peak Marker Adj

Threshold Maps


IXRF Systems specializes in micro-spot X-ray fluorescence (XRF) spectrometers employing energy dispersive detectors (EDXRF). XRF is an X-ray spectrometric technique for elemental analysis of a wide variety of materials. Other phrases for XRF instruments include: microXRF, microEDXRF, micro-XRF, micro-EDXRF, μXRF, μEDXRF, energy dispersive X-ray spectrometry, energy dispersive spectrometry (EDS or EDX), X-ray spectroscopy, energy dispersive X-ray spectroscopy, XRF analyzer, XRF spectrometer, XRF analysis, X-ray fluorescence analyzer, x-ray fluorescence spectrometry, fluorescence x, spectromètre de fluorescence X, Röntgenfluoreszenzanalyse, fluorescencia de rayos X, Röntgenfluoreszenz, Röntgenfluorescentie, Röntgenfluorescens, Röntgenfluoresenssi, Røntgenfluorescens and Promieniowanie rentgenowskie.

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What type of EDS detectors does IXRF offer?

IXRF offers a multitude of different X-ray detectors. You may choose from several different guaranteed resolutions.

I am interested in an upgrade. Can I use my existing EDS detector?

Yes, IXRF was designed to interface with most detectors. We have not come across one which was incompatible. In many cases light element sensitivity is increased due to our digital pulse processing electronics.

When I upgrade my IXRF software, what needs to be done?

Simply download the latest version and install it.

Once I buy an IXRF system and later decide to change to a different SEM, can the IXRF system be adapted to a different SEM?

It the majority of situations, yes the detector can be fitted to be moved to the new SEM. Please contact IXRF at the beginning of your planning so that we can verify if your detector can work for the SEM you are considering purchasing.