ATLAS Apex M Benchtop microXRF Micro-spot Energy Dispersive
X-ray Fluorescence Spectrometry ATLAS X microXRF Ultimate Micro-spot Hyperspectral
XRF Imaging Spectrometer System

∙ Up to 280 mm² SDD for fast maps

∙ 5 um spot size for highest spatial resolution

∙ Largest chamber with 300 x 400 mm mapping

∙ Perpendicular tube geometry for round pixels

∙ Easy-to-use Iridium Ultra software w/ automation

 SEM/EDS | SEM/EDX Energy Dispersive X-ray
Fluorescence Spectrometry
for Electron Microscopy New Systems & Upgrades SEM-XRF Integrated e-Beam / X-ray Beam X-ray Sources for
Electron Microscopy

Our Products

IXRF provides advanced microXRF solutions for geoscience, critical minerals, semiconductors, battery materials, environmental research, and cultural heritage—led by the Atlas Apex platform.

The Atlas Apex microXRF spectrometer delivers high-resolution elemental mapping and hyperspectral imaging from carbon (C) to uranium (U), enabling rapid, non-destructive analysis across diverse materials and applications.

IXRF also offers integrated SEM/EDS and SEM-XRF systems, extending analytical capability for deeper insight in research and industrial environments.

Specializing in: microXRF • SEM-XRF • SEM/EDS

Made in U.S.A.

micro-XRF

Imaging microXRF Spectrometers

The ATLAS series of microXRF hyperspectral imaging spectrometers represents the next generation of general-purpose micro X-ray fluorescence (microXRF) instrumentation for high-resolution elemental analysis and mapping from carbon (C) through uranium (U).

Engineered to analyze a wide range of sample types, ATLAS combines advanced elemental imaging performance with industry-leading analytical capability. From the powerful Iridium Ultra software platform and large-area SDD detectors to superior perpendicular geometry and ultra-fine micro-spot technology, ATLAS delivers exceptional sensitivity, spatial resolution, and analytical flexibility for demanding research and industrial applications.

Microanalysis

SEM/EDS — SEM-XRF — SDD

SEM/EDS:  For scanning electron microscopes (SEM), we offer a complete EDS (EDX) system: software,  SDD detectors, digital signal processor and software. Our Windows®-10 based EDS software – Iridium Ultra – delivers all-inclusive  functionality.

SEM-XRF:  IXRF’s Xb micro-spot X-ray source adds the capabilities of a complete micro X-ray fluorescence (microXRF) spectrometer to any scanning electron microscope (SEM). μXRF users benefit from non-destructive measurements, superior trace element sensitivity and broader elemental coverage (Na through U) .

Recent Articles

Customer Research Spotlight – University of Memphis Advances Microplastic Detection with MicroXRF

| MicroXRF Articles & Elemental Analysis Insights | No Comments
Estimated read time: ~5–6 minutes. Introduction: Expanding the Toolkit for Microplastic Research Microplastics, defined as particles smaller than 5 mm, have rapidly emerged as one of the most pervasive environmental…

Seeing the Invisible—On Earth and Beyond: How MicroXRF is Rewriting Volcanic and Planetary Narratives

| MicroXRF Articles & Elemental Analysis Insights | No Comments
⚡TL; DR — High-resolution microXRF mapping with the Atlas Apex M reveals that lava is not chemically uniform but spatially structured—capturing flow dynamics, elemental segregation, and post-emplacement alteration. This transforms…

MicroXRF vs SEM-EDS for Geological and Petrological Analysis: Why Sensitivity and Scale Matter

| MicroXRF Articles & Elemental Analysis Insights | No Comments
⚡TL; DR — SEM and EDS are powerful tools for high-resolution imaging and micro-scale chemistry, but they are not designed to map large areas or detect low-level trace elements across…

MicroXRF Throughput vs Data Quality: How to Prevent Spectral Distortion at High Count Rates

| MicroXRF Articles & Elemental Analysis Insights | No Comments
⚡TL; DR — In microXRF, “faster” only creates value if spectral integrity holds at elevated count rates. Many systems degrade as throughput rises—broadening peaks, increasing overlaps, and reducing counting statistics—creating…

Advancing Aerospace Materials Confidence with MicroXRF

| MicroXRF Articles & Elemental Analysis Insights | No Comments
⚡ TL;DR Summary The Atlas Apex MicroXRF gives aerospace organizations high-resolution, non-destructive elemental analysis that significantly improves materials confidence. It enables engineers to verify complex alloys, coatings, and additive-manufactured parts…

Why High-Resolution MicroXRF Is Becoming Essential for Critical Mineral Strategy

| MicroXRF Articles & Elemental Analysis Insights | No Comments
⚡ TL;DR Traditional XRF core scanners cannot resolve the micron-scale mineral features that define the value, processing behavior, and strategic viability of critical mineral deposits. High-resolution microXRF systems like the…
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ATLAS M

IXRF Systems specializes in micro-spot X-ray fluorescence (XRF) spectrometers employing energy dispersive detectors (EDXRF). XRF is an X-ray spectrometric technique for elemental analysis of a wide variety of materials. Other phrases for XRF instruments include: microXRF, microEDXRF, micro-XRF, micro-EDXRF, μXRF, μEDXRF, micro XRF, energy dispersive X-ray spectrometry, energy dispersive spectrometry (EDS or EDX), X-ray spectroscopy, energy dispersive X-ray spectroscopy, XRF analyzer, XRF spectrometer, XRF analysis, X-ray fluorescence analyzer, x-ray fluorescence spectrometry, fluorescence x, spectromètre de fluorescence X, Röntgenfluoreszenzanalyse, fluorescencia de rayos X, Röntgenfluoreszenz, Röntgenfluorescentie, Röntgenfluorescens, Röntgenfluoresenssi, Røntgenfluorescens and Promieniowanie rentgenowskie.

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FAQs

How is microXRF different from conventional XRF?

Conventional XRF provides bulk elemental analysis over millimeter- to centimeter-scale areas. MicroXRF uses focused beams to resolve elemental distributions at the micron scale, enabling detailed analysis of elemental zoning, inclusions, phase boundaries, and layered structures that bulk XRF cannot resolve.

How does microXRF compare to SEM-EDS?

MicroXRF offers greater analysis depth, improved trace-element sensitivity, and no vacuum requirement, making it well suited for large, thick, or non-conductive samples. SEM-EDS provides higher surface spatial resolution but is limited to near-surface analysis and often requires conductive coatings.

What spatial resolution can Atlas Apex achieve?

Depending on configuration, the Atlas Apex microXRF system achieves spot sizes down to ~5 µm, enabling detailed micro-XRF elemental mapping of fine features such as grain boundaries, inclusions, reaction fronts, and compositional gradients.

What applications is Atlas Apex microXRF best suited for?

Atlas Apex microXRF is widely used for:

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