“The technological progress in the fields of small-spot low-power X-ray tubes and of polycapillary X-ray optics has enabled the development of compact micro-focus X-ray sources that can be attached onto a SEM/EDS (scanning electron microscope with energy dispersive X-ray spectrometer) system.”
Micro-Focus X-Ray Fluorescence (μ-XRF) as an Extension of the Analytical SEM. V.-D. Hodoroaba,* V. Rackwitz,* and D. Reuter*. Microsc. Microanal. 16 (Suppl 2), 2010.
* BAM Federal Institute for Materials Research and Testing, 12200 Berlin, Germany