DATA DISCOVERED

SEM-XRF

The chief component of X-ray Fluorescence brought into the SEM chamber is a low powered transmission target X-ray tube. The tubes are reduced in size and produce less heat than larger, higher powered tubes. Mo, W and Ag thin film targets deposited on a Be window are available for varying applications.

X-ray tube additions may be interfaced to almost any SEM. High angle (35deg) as well as horizontal flange mounts are available for every tube package.

Packaged tubes may be operated up to 50kV and come with integral high voltage power supplies. Power supplies are integrated with interlocking vacuum sensors which shut off the x-rays when the SEM chamber is vented. Each unit automatically “ramps” the tubes for increased longevity.

The addition of focusing capillary optics enables microspot XRF analysis down to 10 microns. A greatly reduced spot size increases XRF X-ray elemental mapping capability and enhances trace analysis at the micron level.

THE ADDITION OF XRF TO THE SEM BRINGS:

  • INCREASE. Higher peak to background ratios enables greater elemental sensitivity for higher Z elements; sensitivity exceeding SEM-EDS by a factor of 10-1000x

  • IMPROVE. Increased beam stability, premium X-ray detectors and greater vacuum, yields higher accuracy when using standards making ppm level analysis a snap!

  • SEPARATE. Less complex handling of various peak overlaps

  • VALUE ADDED. Analysis of non-conductive materials without coating

  • VALUE ADDED. Integrated with EDS software for the most accurate low energy-high energy (full spectrum) analysis available

This is a picture of a 12 micron Ni grid X-ray map. The grid is imaged with a 10 micron “X-Beam” demonstrating 10 micron spatial resolution.

Combined EDS and XRF X-ray mapping bring previously unseen capability to the microscopist. Never before have the two been combined and made commercially available for the microanalyst.

EDS-XRF INTEGRATED ACQUISITION

EDS

In order to acquire the most comprehensive and accurate full spectrum in seconds, use your EDS system to capture the light elements between 0-3kV; use the iXRF SEM-XRF tool to acquire the heavier, higher energy elements between 3-50kV.

XRF

Acquire your full spectrum using one technique at a time or run in simultaneous mode. Acquire light and heavy elements using two techniques at the same sample location without ever opening the chamber.

COMBINED QUANTITATION

See both the EDS spectrum and the XRF spectrum in our exclusive dual panel display for quick qualitative comparison. Experience quantitative power like never before. Run in full auto mode for fast standardless analysis of all elements.  Our software will automatically select the appropriate line series for each element.  For quantitative superiority, customize line series and use standards to mix-match quantitative routines. Only IXRF offers the flexibility to use any quantitative routine for individual elements in a single spectrum!

AVAILABLE QUANTITATION ROUTINES

  • Auto
  • ZAF
  • FP
  • Least Squares
  • Match

SPECTRAL COLLECTION & QUANTITATION

XRF provides non-destructive analysis of various sample sizes and sample types including solids, environmental samples, powders and residues. Below are examples of common applications for traditional tabletop (bench top) XRF that are now available inside the SEM:

  • Art and Archeological
  • Chemical
  • Coatings and Thin Film
  • Cosmetic
  • Educational
  • Environmental
  • Food Applications
  • Forensics
  • Metal and Ore
  • Mineral and Mineral Products
  • Petroleum EDXRF
  • Pharmaceutical Applications
  • Plastics, Polymers, and Rubber
  • Plating and Plating Baths
  • Wood Treating
  • Concrete Treating
  • And Others

MAPPING

Trace elemental mapping is possible for nearly all of the above applications. XRF mapping can be performed using either of our products; shown here by this mineral map using the X-Beam.

INCREASE SENSITIVITY

XRF can be used for trace spectral acquisition down to low PPM levels. XRF can be 10-1000 times more sensitive than SEM-EDS analysis, exemplified here by the greatly increased trace level peaks in the NIST SRM 610 glass standard.

INCREASE ACCURACY

XRF can be used for trace spectral acquisition down to low PPM levels. XRF can be 10-1000 times more sensitive than SEM-EDS analysis, exemplified here by the greatly increased trace level peaks in the NIST SRM 610 glass standard.

The IXRF SEM-XRF option, offers the ability to use both the electron beam and Micro-XRF beam simultaneously. With the electron beam at 3-5kV, only the light elements are excited. There is no significant background added to the XRF spectra, allowing all the elements in the sample to be seen.

Below are example maps of both excitation in “play”, on the same sample, at the same time! Never before has this ability been demonstrated.

OUR PRODUCTS DO IT ALL

PRODUCT FEATURES

The new ƒX SEM™ custom x-ray source is designed exclusively for use on electron microscopes.  The compact design, and slide mounting, allow very close coupling to the sample.  The orientation yields high “flux” (x-rays) in small to large excitation areas on the sample surface. The ƒX SEM™ offers excitation areas 500µ to 25mm.  The integrated high-voltage power supply operates up to a maximum power of 10 watts (35 kV and 0.1 mA depending on anode material). The close coupling provides XRF analytical results comparable to those from traditional “benchtop” or “standalone” units.  The ƒX SEM™ is designed so that it does not interfere with the normal operation of the electron microscope, including the use of the electron beam on the same sample, at the same time collecting all elements simultaneously.

No special cooling is required.

But why?

Electron beams (from scanning electron microscopes) produce very high backgrounds hiding the trace elements in the sample. X-rays, from a true “x-ray” source don’t have this effect. Using the ƒX SEMTM low ppm levels of elements can be easily identified, quantified, and even producing trace level x-ray maps to view elemental distribution of trace elements in your sample.

PRODUCT SPECIFICATIONS

ƒX

ANODE TYPE

End-window transmission

TARGET MATERIAL

Ag, Mo & W

ACCELERATING VOLTAGE

10-35kV

BEAM CURRENT

0-100µA

ANODE SPOT SIZE

<500µm

COLLIMATOR SIZE

200µm, 500µm, 1000µm (others available)

SOURCE FILTERS

Available upon request

COOLING REQUIREMENTS

Conduction cooled, no fan required

CONTROLS/SAFETY

Variable control kV/µA, X-ray on/off buttons, kV/µA display. Interlocked to SEM, keyed power-on switch, Integrated high-voltage power supply, HV-On lamp, warning beacon

OUR PRODUCTS DO IT ALL

PRODUCT FEATURES

The Xb custom x-ray source is designed exclusively for use on electron microscopes.  The compact design, and slide mounting allow very close coupling to the sample. Patented polycapillary optics focus x-ray excitation down to sample spot size as small as 10µ. The Xb is offered in 10µm and 40µm spot sizes. The integrated high-voltage power supply operates up to a maximum power of 50 watts (35-50 kV and 1.0 mA depending on anode material). The close coupling provides XRF analytical results comparable to those from traditional “’tabletop” or “standalone” units.  The Xb is designed so that it does not interfere with the normal operation of the electron microscope, including the use of the electron beam on the same sample, at the same time collecting all elements simultaneously.

No special cooling is required.

But why?

Electron beams (from scanning electron microscopes) produce very high backgrounds hiding the trace elements in the sample. X-rays, from a true “x-ray” source don’t have this effect. Using the Xb low ppm levels of elements can be easily identified, quantified, and even producing trace level x-ray maps to view elemental distribution of trace elements in your sample.

Xb

PRODUCT SPECIFICATIONS

ANODE TYPE

Side-window

TARGET MATERIAL

Ag, Cu, Mo, Rh & W

ACCELERATING VOLTAGE

0-50kV

BEAM CURRENT

Max 1mA

EXCITATION SPOT SIZE

10, 20, 40µm

COLLIMATOR SIZE

Patented Polycapillary Focusing Optic

SOURCE FILTERS

Available upon request

COOLING REQUIREMENTS

Fan cooled for power > 100watts

CONTROLS/SAFETY

Variable control kV/µA, X-ray on/off buttons, kV/µA display, internal interlocked shutter. Interlocked to SEM, keyed power-on switch, HV-On lamp, warning beacon

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